The Global Standard of Plasma Gas Scrubber

YHS-04W

Environmentally complete decomposition and treatment system of hazardous PFCs gases used in semiconductor & LCD manufacturing industry, by using The Heater.
Youngjin IND’s High-plasma Scrubber can decompose PFCs Gases(greenhouse gases)including flammable, Corrosive and toxic gases generated from the semiconductor & LCD manufacturing process equipment by using The Heater.
YHS-04W 이미지

  • Applicable Areas

    For dealing with cleaning gas in semiconductor & LCD manufacturing process

  • Apply Gas

    All process gas including PFCs gas

Product Specifications

Item YHS-04W
TYPE Heat Wet
Dimension 800 x 800 x 1800
Capacity 500LPM
Weight 500 kg
Inlet NW40 X 4Port
Outlet MF100 X 1Port
Drain Power & Natural Drain
  • Features of Product

    High quality and ultimate safety

    High decomposition efficiency in treating PFCs gases

    Automatic anti-dogging pressure control in Scrubber(PLC Control)

    Easy installation & cost-effective management/maintenance

    Preventing CO2 generation (No need of fuel gas)

  • Application Process & Gas

    Process: All process for manufacturing semiconductors, LCD/OLED

    Gas: All manufacturing process-related to gas treatment Including PFCs

Features of Product Component

  • Heater With Inner Housing Decomposition
    - Perfect decomposition of toxic gases
    Spray Quenching/Absorption
    - Excellent removal of by-products through spray quenching
    Auto Power Drain
    - Drain wastewater smoothly
    Gas Vent
    - Minimized Exhaust of powder, water & moisture
  • Pressure Control
    - Measure the accurate pressure and powder clogging status through PID-type pressure
    Auto Control System
    - PLC-based touch screen display
    - Auto/Manual modes & easy control
    - Demonstrating errors & recording history error log
    - Fast response & high accuracy by PLC Control
    By-Pass Function
    - Automatic gas-flow control by 3-way pneumatic valves

Product Specification

Model Name Dimension [W x D x H] Capacity(Ipm) Inlet Q’ty[EA] Applicable Process Remarks
YHS-04W 800 x 800 x 1800 500 4 CVD, T/F, DIFF For wafer process

Utility Specification

Cabinet Dimension(mm) WIDTH DEPTH HEIGHT
800 800 1800
POWER Voltage AC 208V
PHASE 3Phase
Current 50A, 50 ~ 60Hz, 4lines
Max. Capacity 500LPM
UTILITY SIZE TYPE FLOW(LPM) PRESSURE(PSI)
GAS 1 GN2 3/8” SUS 15 ~ 30 50 ~ 85
2 CDA 3/8” SUS 100LPM 50 ~ 85
WATER 3 PCW IN 1/2” SUS 7 ~ 10 50 ~ 71
4 PCW OUT 1/2” SUS 7 ~ 10 50 ~ 71
5 NPW 1/2” SUS 4 ~ 20 35 ~ 71
EXHAUST 6 CABINET MF100 SUS 600
USER GAS 7 INLET NW40 SUS 150
8 OUTLET MF100 SUS 600
9 BY-PASS NW40 SUS 150
DRAIN 10 POQWR 1” CPVC Use Forced Drain
11 NATURE 1 1/2” CPVC Use Natural Drain

TAGET ABATEMENT GAS

PFC gases : NF3, SF6, etc.

Flammable gases : SIH4, TEOS, H2, PH3, etc.

Water Soluble gases : BCL3, Clw, HF, HCl, NH3, etc.